Basic Info.
Product Description
The main features of the semiconductor ceramic mechanical arms
1. High precision dimensions with tightening tolerance, it's easier to get a perfect fitting relationship
2. High-temperature ability: withstand up to 1650°C in oxidizing and reducing atmospheres
3. Wear & abrasion resistance: Alumina is extreme hard technical ceramic with superb wear resistance
4. Chemical inertness, resistant most of the strong acid and alkali, and does not rust forever
5. Electrical insulation: The insulation breakdown is up to 18KV at least
6. Great mechanical properties, hardness, compressive and flexural strength are much higher stainless steel
7. Chemical corrosion resistance under high temperature, even if with strong acid or alkali
8. Protective atmospheres or high vacuum at high-temperature to eliminate contamination or impurity.
9. Low material cost in high-level applications than other technical ceramics
The specification of ceramic parts
| Material option | Alumina(Al2O3), Zirconia (ZrO2), Silicon carbide(SiO2), Silicon nitride(Si3N4) |
| Forming methods | ISO pressed, Dry pressed, Ceramic injection molding, Hot pressed |
| Specification | OD can be from 1 to 50mm, length can be from 10mm to 800mm |
| Precision processing | CNC machining, Precision grinding, Polishing, Lapping, |
| Tolerance | The tolerance of OD and ID can be 0.001mm, the tolerance of length can be 0.001mm |
| Key parameters | Roughness to be 0.02mm, Flatness to be 0.001mm, Parallelism to be 0.001mm |
| Surface quality | Free of cracks, foreign contamination, mirror surface better than Ra0.1 |
The description of high precision alumina ceramic mechanical arm
For semiconductor devices, the critical process, as well as the parts which need to be used in a vacuum, high temperature, and corrosive gas environment, also require a clean and dustless environment. However, precision ceramic material could maintain high stability in a complicated physical and chemical environment. Semiconductor ceramic part we produced with wear resistance, corrosion resistance, low thermal expansion, insulation is made from 99.8% alumina ceramic and formed by cold isostatic pressing, high-temperature sintering, and precision machining, that's why can meet the stringent requirements of parts for semiconductor equipment.
The gallery of high precision ceramic parts
Remark:
We have the capability with a variety of complicated geometry of high precision ceramic parts via CNC machining, precision grinding, precision drilling, and so on.
Datasheet of Technical ceramics
| Property | Units | Material | ||||
| 99.5% alumina | 99% alumina | 95% alumina | ZrO2 (Y-TZP) | ZrO2 | ||
| Density | g/cm3 | ≥3.85 | ≥3.80 | ≥3.60 | ≥5.95 | ≥5.72 |
| Water absorption | % | 0 | 0 | 0 | 0 | 0 |
| Hardness | HV | 1700 | 1700 | 1500 | 1300 | 900 |
| Flexural strength | Mpa | ≥379 | ≥338 | ≥320 | ≥1200 | ≥1200 |
| Compressive strength | Mpa | ≥2240 | ≥2240 | ≥2000 | ≥1990 | 1750 |
| Fracture toughness | Mpa m1/2 | 4-5 | 4-5 | 3-4 | 6.5-8 | 11 |
| Max. service temperature | ºC | 1675 | 1600 | 1450 | 1000 | |
| CTE | 1×10 -6 /ºC | 6.5~8.0 | 6.2~8.0 | 5.0~8.0 | 8.0~9.5 | 10.2 |
| Thermal shock | T(ºC) | ≥250 | ≥200 | ≥220 | ≥300 | 350 |
| Thermal conductivity(25ºC) | W/m.k | 30 | 29 | 24 | 3 | 3 |
| Volume resistivity | ohm.cm | |||||
| 25ºC | >1 x 10 14 | >1 x 10 14 | >1 x 10 14 | >1 x 10 11 | >1 x 10 11 | |
| 300ºC | 1 x 10 12 | 8 x 10 11 | 10 12 -10 13 | 1 x 10 10 | 1 x 10 10 | |
| 500ºC | 5 x 10 10 | 2 x 10 9 | 1 x 10 9 | 1 x 10 6 | 1 x 10 6 | |
| Insulation strength | KV/mm | 19 | 18 | 18 | 17 | 20 |
| Dielectric constant(1Mhz) | (E) | 9.7 | 9.5 | 9.5 | 29 | 28 |
Our capability and strength
We have in-housing comprehensive manufacturing types of equipment, including forming, sintering,
CNC machining, precision grinding, laser cutting, and so on, it helps us to control the quality very well.
Also, it greatly benefits cost control.
The state of the art manufacturing equipment
Rigorous Quality-control System
Remark:
We have the complete quality-control system per ISO9001, including IQC, IPQC, QA, and OQC process.
Typical Packaging Proposal and Transportation Methods
1. Packaging proposal
2. Regular Transporation Methods
FAQs (Frequently Asked Questions)
Q1. Are you a factory or trading company?
A: We are a manufacturer of over 15 years of experience. You are welcome to visit our factory.
Q2: Do you send a sample to check?
A: Sure, the sample is free and freight collect.
Q3: When will you ship it?
A: If the products are in storage, we'll ship within 48 hours
Q4: When can I get the price?
A: We regularly quote within 24 hours after we get your inquiry. If you are in urgent need of getting the price.
Please call us or tell us in your email so that we will proceed with your inquiry as a priority.
Q5: Is it available to provide customized products?
A: We always support custom-made demand as per different materials, dimensions, and designs.